The Moxtek Clinic Team 2010-2011 Blog
Date: Feb 25, 2011
When testing layer 3 on the wafer we were able to find similar defect patterns to layers 1 and 2. The big difference though was that the threshold levels had to be reduced, because the intensity for some reason was much less than that of the other layers. We are currently trying to figure out why this is and hope to have a solution soon
Date: Feb 24, 2011
Good first pictures.
Please send time line and milestones
Date: Feb 24, 2011
We are currently testing wafers and trying to get our image processing completed.
Here is a test we are doing with a wafer with 2 etches on it. Here are the defects on this wafer.
Date: Jan 23, 2011
We have made a good amount of progress this last week. The two major accomplishments of this week were; 1. we have successfully figured out how to control the motors in Labview, now we just need to write a state machine to automate the process. 2. The top mount is almost done, it just needs to be cut and installed. Another big thing that happened this week is the progress made with the camera drivers and software. In order the use the Paxcam in Labview, we need the correct windows and directshow drivers, which we got from Paxit. However, these are still not working 100% correctly, due to a windows 7 problem. We are currently troubleshooting and will hopefully fix the problem by the beginning of next week. A skeleton for the entire Labview program is still a work in progress.
Date: Jan 18, 2011
Date: Jan 12, 2011
We have finally mounted the bottom stage and wafer DUT apparatus to the base of VIPP01. I will upload pictures as soon as possible. Still working on ordering gearing and worm drives for the stages, and cutting pieces for the upper stage mount. We hope to be underway with fabrication and gears in route ASAP. We are currently trying to avoid using the Paxcam software, because it is currently unavailable to us to upload onto our computer we are working on. If it is found, it would be greatly appreciated!!!! We are currently attempting to strictly use Labview to communicate and acquire images from the camera for analysis. This has been proving kind of difficult, and we may need to go a different route.
Better tests and examples of why and how the procedure will work will be underway shortly. We hope to have a video of this test and a real wafer going through the process for our presentation. This will help with the understanding of how polarizers and our system work.
We will need to meet with Moxtek in about three weeks, we are aiming for a lot of progress by then, and it would be beneficial to have the representatives of Moxtek to come to the University to visually see the progress and give possible advice.
Moxtek- when we meet next, please have for us two pixelated polarizers. One with a single layer etched, and one with two layers etched. We are ready to test these! We my even be able to test one with three layers by the time you come up. So, if you wish to bring all three, that would be awesome.
Date: Dec 29, 2010
During the holidays, we are working on finding the correct gearing for the stages and motors. A picture of what we desire is shown below.
The plan is for this to sit on top of the stages so thats there is more room for them to be mounted on the sides.
ALSO, the top stage mount is still being examined and we are trying to get a final idea for it all.
Date: Dec 14, 2010
Summary: Glad to see the progress. Thanks for coming down.
Date: Dec 12, 2010
We ran a few experimental tests this weekend to present our idea to Moxtek
We essentially created an enlarged pixel of a pixelated polarizer to test. This will allow us to examine if our idea for the two separate rotation stages to single out a layer will work or not.
From these tests, it looks like our idea is going to work, it also gave us some insight on how to tell if another layer is affecting the layer being tested.
Also, we got the motors for the stages in, we are not looking for gearing. We are also pursuing a way to mount the upper rotation stage.
Date: Dec 7, 2010
We have set up a meeting at Moxtek for December 15, 2010.
We hope to review what we have done so far, and our plans for the near future with a powerpoint.
Date: Nov 22, 2010
The paxcam camera has been installed, and we are currently working on installing the stages. Also, some preliminary testing procedures are being examined. We have taken a few video clips and pictures of both a standard polarizer and a pixelated polarizer.
Date: Nov 18, 2010
The sheet polarizer we ordered from Edmund's Optics finally came in yesterday.
The paxcam camera is in our possession, and installed on VIZ01 (VIPP01 - Visual Inspection of Pixelated Polarizers 01).
Software is currently being examined to use the camera - as is.
We currently have a meeting with the University's CLEAR Center to practice our design presentation before we give it to Moxtek. (CLEAR CENTER - 2:00 PM, and our own practice is at 11:35)
Preliminary tests, using the sheet polarizer from Edmund's and the wafers given to us by Moxtek. We hope to get a better idea if our idea is going to work or not. We spent some time today looking at the images we are getting, we need to look at alignment and other things in order to get accurate results
Hardware - the sheet polarizer is to be installed on the stages from IGUS, and the bottom stage is nearing completion, but methods for installing the top stage are being examined.
Date: Oct 7, 2010
-We have attained a few test wafers, the camera, and the lens from Moxtek.
-The camera lens and camera must be shipped off in order to attach the lens to the camera correctly for focusing and zooming purposes.
-We will need a screw-in to F-mount adapter, and according to Vern this is something that will have to be done by the manufacturer (either Nikon or Paxcam, I'm not sure which). He said that the camera and lens will have to be shipped out to have this done because the distance between the plane of the CMOS detector of the camera and the focal length of the lens have to match very closely.
-IGUS has donated slew ring bearings for our project!!!!!!!!!
-Slew ring with a 100mm I.D. Opening
Cost is: $631.88
-Slew ring with a 200mm I.D. Opening
Cost is: $875.00
Motors and Controllers
CAD drawing of VIZ01 without the rotation stages added
The camera is a Paxcam "ARC" model # PS-CM, the lens is a Nikkor autofocus 14mm f2.8 lens D ED AF.
Attached is a scan of a CAD drawing that I asked Vern to print off for me
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