courses

Welcome to the University of Utah MicroSystems Group Website

Professors (all departments in the college of engineering)

contact information for all professors can be found in the UU Directory

Dr. Tim Ameel (Mechanical Engineering, microfluidics, convection)
Dr. Steve Blair (ECE, micro and nano-optics)
Dr. Richard B. Brown (Dean, College of Engineering, MEMS sensors(gas and liquid concentration, biomedical applications)
Dr. Bruce Gale (Mechanical Engineering, microfluidics, biomedical applications)
Dr. Ian Harvey (Manager, Utah Microfabrication Facility, Mechanical Engineering, assembly and packaging)
Dr. Mark S. Miller (ECE/ Materials Science, micro fuel cell, bio/nano electronics, epitaxy, materials)
Dr. Angela Rasmussen (ECE, modeling and simulation, fluidics)
Dr. Florian Solzbacher (ECE, Director Microsystems Laboratory, www.microsystems.utah.edu, harsh environment MEM/sensors, actuators)
Dr. Gerald Stringfellow (ECE, compound semiconductors III/V, II/VI, laser diodes and LEDs, MOCVD, materials)

University of Utah Microsystems / MEMS related courses

Microsystems certificate course program outline (compulsory and recommended courses)

Packaging Introduction to packaging (new planned for fall 2005)

Introduction to Multichip Modules (planned)

Applications Microsensors and Actuators ECE 6231/7231

Semiconductor Physics (Physics 6510, 6520)

Advanced Optoelectronics ECE 6262

Integrated Optics and Optical Sensors ECE 6440

Microwave Devices and Physical Electronics II ECE 6331/32

Magentic Materials and Devices MetE 52/7280

Advanced Silicon Devices ECE 6264

Special Topics

Advanced Microscale thermal fluidics (Ameel Special Topics)

Physical Theory of Semiconductors MSE/ECE 6261

Classical and quantum semiconductors ECE 6263

Fabrication of Semiconductor Devices

Semiconductor device physics I/II ECE/MSE 5201/5202 (with labs)

Silicon chip processing ChFE 5655

Advanced Processing of Semiconductors ECE/MSE 6265

Fundamentals of Microfabrication ECE 5221/6221, MSE6421, BioEnG 6421, Me 5050/6050

Process Engineering

Statistics MetE 5/6690

Design & Simulation

VLSI Design I/II (ECE 6710/20 analog/digital with labs)

Design and simulation of microsystems ECE 6960

Characterization

Structural Analysis of Materials? MSE 3011

Advanced Semiconductor Device Characterization ECE/MSE 6266

Materials Surfaces/Interfaces MetE 5/6660

Surface Chemistry Chem 7780

Other Classes of Interest to Graduate Students

UGS 6000 Teaching in Higher Education (for more information: http://www.utah.edu/taresources/UGS6000.pdf,

or contact Kim Welch at: tel. 581-7597; email welch-k@ugs.utah.edu)

Wrtg 6000 Technical Writing (help writing your thesis proposal)

CS Proposal Writing

Senior Design Projects

Senior design projects are given out by MEMS faculty upon individual request and planning. Fields include biomedical devices, industrial automotive and aerospace applications, sensors and actuators, microfluidics

Suggested Undergrad Breadth and Elective Courses for EM

Fall Junior	Spring Junior
ECE 2100 Fund Eng Electronics
ECE 3720 Embedded System Design
ECE 3300 Fund EM and transmission lines
Fall Senior	Spring Senior
ECE 3961 Business of Engineering I	ECE 3961 Business of Engineering II
ECE 5201 Semiconductor device physics I	ECE 5221 Fundamentals of Micromachining
ECE 5225 Microsystems Characterization	ECE 5441 Fiberoptic systems
	ECE 5720 Analog IC Design
	ECE 5202 Semiconductor device physics II

See Undergrad Advising for Remainder of Program Back to Top

Master's Program

This program is very flexible. Add your desired classes to the MS spreadsheet (may also be used for ME). Suggest choosing 1 area of specialty with supporting classes and subspecialty mostly from ECE. Discuss with your major advisor or one of the professors listed above. More Details on the UU MS / ME / BSMS / BSME programs

PhD Program

This program is very flexible. Add your desired classes to the PhD spreadsheet.
Suggest choosing 1 area of specialty, 1 area of subspecialty, and taking several courses outside the department to compliment these specialties. Discuss with your major advisor.
More Details on the PhD programs Back to Top

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