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Wen Yuan

Department of Electrical and Computer Engineering

Contact

University of Utah
Department of Electrical and Computer Engineering
50 S. Central Campus Drive, Room 3280
Salt Lake City, UT 84112-9206
E-mail: wen dot yuan at utah dot edu

 

Publications

"FABRICATION OF PLASMA PROBE FOR CHEMICAL VAPOR DEPOSITION"
Wen Yuan, Karumbaiah N. Chappanda and Massood Tabib-Azar
Transducers 2011, Beijing, China

"Microfabrication of plasma nanotorch tips for localized etching and deposition"
Xie, Yan; Yuan, Wen; Tabib-Azar, Massood; Mastrangelo, Carlos H.;
Sensors, 2010 IEEE
2010 , Page(s): 2243 - 2246

"Tip based chemical vapor deposition of silicon"
Tabib-Azar, Massood; Yuan, Wen;
Sensors, 2010 IEEE
2010 , Page(s): 2235 - 2238