Graduate Solid State / MEMS


The University of Utah has a world-renowned program in solid-state electronics and Micro-Electro-Mechanical Systems (MEMS). We have world-class faculty conducting research and teaching in modern semiconductor materials and devices, sensors and actuators at both micro and nano scales, microfabrication technologies, biomedical microdevices, and quantum computing. Our program also provides exciting research opportunities in our state-of-the-art Nanofab Lab for students to explore in these advanced areas to develop strong technical skills that will enable them to become the next-generation researchers, engineers, and leaders in this globally competitive industry.

Solid State / MEMS Faculty and Research

Suggested Courses and Program of Study


The following is a suggested Program of Study for a full-time Electrical Engineering graduate student pursuing an MS degree with an emphasis in Solid State / MEMS. It is not required that students follow this course schedule, but it can used as a guide for planning out their graduate studies.

This Program of Study meets the requirements for the Coursework option and can easily be modified to meet the Project option. Students who wish to complete the Thesis option will need to take 10+ credit hours of ECE 6970 Thesis Research are recommended to meet with the Graduate Student Coordinator to create their academic plan.

As long as the MS degree requirements are met, any 5000-level or above ECE or allied (Math, Physics, CS, or other Engineering) courses may be substituted.

Non-Thesis Supervisory Committee


Mike Scarpulla



Semiconductors and photovoltaics: earth-abundant, benign compound semiconductors for thin film photovoltaics such as Cu2ZnSnS4. Other sulfide semiconductors for PV, light management for thin film PV, CIGS, laser processing of semiconductors, and the physics of semiconductor alloys and transition metal and rare earth additions to semiconductors.

Hanseup Kim



Biological nano- and micro-systems in moving fluids for medical applications including micro- pumps and valves. System integration in robotics and energy harvesting for micro- robots, actuators, hydraulics, energy harvesting systems, and manufacturing technology

Heayoung Yoon



Solar energy conversion, NanoEngineering: Engineering micro/nanomaterials to enhance device performance and functionality in the fields of solar energy conversion, advanced nanoelectronics, and 3D hybrid imaging at nanoscale

Industry Partners